Top-A TechnologyPRODUCT
invents and manufactures semiconductor manufacturing equipment and environmental testing equipment,
including LED/LCD equipment, ovens, chambers, and automobile parts testing equipment
for sale both domestically and overseas.
PRODUCT
Vacuum chamber
| Model No. | TOP-VD 27 | TOP-VD 64 | TOP-VD 150 | TOP-VD 512 | |
|---|---|---|---|---|---|
| Test space volume (Liters) | 27 | 64 | 150 | 512 | |
| Internal dimension (mm) | W | 300 | 400 | 500 | 800 |
| D | 300 | 400 | 500 | 800 | |
| H | 300 | 400 | 600 | 800 | |
| External dimension (mm) | W | 680 | 780 | 880 | 1,180 |
| D | 500 | 600 | 700 | 1,100 | |
| H | 1,200 | 1,200 | 1,350 | 1,600 | |
| Customized dimension | Different size of chambers are available on customer"s requirement. | ||||
| Temperature control range | RT+10°C ~ 200℃(Over 200℃ is an optional spec) | ||||
| Temperature fluctuation | Less than 0.5°C(vacuum), Less than 1.0°C(atmospheric) | ||||
| Temperature uniformity | Less than 2.0°C at 200℃ | ||||
| Heat-up rate | Within 55min (from RT to 200°C) | ||||
| Pressure control range | 1bar (100kPa) ~ 1mbar (100Pa) | ||||
| Pressure pull-down rate | Within 15min (from 1bar to 1mba) | ||||
| Pressure recovery time | Within 10min | ||||
| Vacuum pump | - Pump type: Oil rotary vane pump - Exhaust capacity: 193liter/min~290liter/min - Ultimate total pressure: 2X10＾-3mbar |
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| Power supply | 200VAC 3PH 50/60Hz, 220VAC 3PH 60Hz, 380VAC 3PH 50/60Hz | ||||
| Option | - Temp and vacuum recorder - Hermetic terminals for applications or for thermocouples - Additional shelves - Oil mist eliminator and exhaust filter |
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